What is Multi-Patterning Technology (MPT)?
Cadence Design Systems Cadence Design Systems
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 Published On Apr 18, 2024

This video talks about Multi-Patterning Technology (MPT). In advanced nodes, a layer is split into multiple masks if the spacing between the shapes is too close to be correctly printed in one step using optics. This technology that enables the splitting of a layer into multiple pattern masks is known as Multi-Patterning Technology.

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